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      產品展示 / products 您的位置:網站首頁 > 產品展示 > 氣體質量流量計 > Brooks質量流量計 > Brooks SLA5853S 質量流量計

      Brooks SLA5853S 質量流量計

      簡要描述:Brooks SLA5853S 質量流量計長期零點穩定性,每年變動小于滿量程的 0.2%;流量范圍寬 - 從0.003一直到 2500 lpm;耐壓等級 - 高達 1500 psi/100 bar(可選:4500 psi/310 bar)

      • 產品型號:
      • 廠商性質:代理商
      • 更新時間:2021-03-08
      • 訪  問  量:737
      詳情介紹

      性能

      流量范圍-滿量程容量

      .003 - 2500 slpm

      精度

      17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)

      ±0.6% of SP (20- FS)

      ±0.12% of FS (<20% FS)

      1100 slpm up to 2500 slpm: ±0.6% of FS

       

      Standard Devices (includes uncertainty from reference standards

      ±0.9% of SP (20- FS)

      ±0.18% of FS (2-20% FS)

      1100 slpm up to 2500 slpm: ±1.0% of FS

      重復性

      0.20% SP

      線性

      Included in accuracy

      響應時間-常閉

      0.003 - 100 slpm: <1 second

      100 - 2500 slpm: <3 seconds

      多氣體多量程

      Standard

      大壓力

      .003-200 slpm: 1500 psi/103 bar

      100 - 2500 slpm: 1000 psi/70 bar

      Optional 4500 psi/310 bar on 50 slpm max device

      控制范圍

      1-50 slpm: 100:1 Turndown for F.S.

      50-2500 lpm: 50:1 Turndown for F.S.

      零點穩定性

      < 0.2% F.S. per year

      溫度系數

      Zero: <0.05% of F.S per oC

      Span: <0.1% of S.P. per oC

      壓力系數

      0.03% per psi (0-200 psi N2)

      靈敏度

      <0.2% F.S. maximum deviation from specified accuracy after re-zeroing

      等級

      大溫度

      65oC

      壓差范圍

      Controllers

      .003 - 50 lpm: 5 psi / 0.35 bar

      50 - 100 lpm: 10 psi / 0.69 bar

      500 lpm: 7.5 psi / 0.52 bar

      1000 lpm: 14.5 psi / 1.00 bar

      2500 lpm: 35.0 psi / 2.41 bar

       

      漏率

      1x10-9 atm cc/sec He

      機械

       

      密封材料

      Elastomer Seal

      接液材料

      316L Stainless Steel

      High Alloy Stainless Steel

      Viton® Fluoroelastomers

      Buna-N

      Kalrez®

      Teflon®/Kalrez®

      EPDM

      閥門

      Normally Closed

       

      Normally Open

       

      Meter (no valve)

      診斷

       

      診斷能力

      Available

       

      狀態燈

      MFC Health, Network Status

       

      報警

      Sensor Output

      Control Valve Output

      Over Temperature

      Power Surge/Sag

      Network Interruption

       

      診斷/服務端口

      RS485 via 2.5mm jack

       

      電氣

       

       

      模擬通訊

      0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA

      數字通訊

      DeviceNet™
      EtherCAT®
      EtherNet/IP™
      FOUNDATIONTM Fieldbus
      Profibus®
      PROFINET
      RS-485 

      電氣連接

      DeviceNet™: 1xM12 with threaded coupling nut (B)

      EtherCAT®, EtherNet/IP™: 1x5-pin M8 with threaded coupling nut/2xRJ45

      Profibus®: 1x15-pin Male Sub-D/1x9-pin female Sub-D

      RS485: 1 x 15-pin Male Sub-D, (A)

      電源-功耗

      Analog / Profibus® / RS-485

      Valve Orifice > 0.032": 8 Watts

      Valve Orifice ≤ 0.032": 5 Watts

      Without Valve: 2 Watts

      DeviceNet™ / EtherNet/IP™

      Valve Orifice > 0.032": 10 Watts

       

      Valve Orifice ≤ 0.032":  7 Watts

       

      Without Valve: 4 Watts (DeviceNet™), 3 Watts (EtherNet/IP™)

      EtherCAT®

      Valve Orifice > 0.032": 8.5 Watts

       

      Valve Orifice ≤ 0.032": 5.5 Watts

       

      Without Valve: 2.5 Watts

      承諾

      認證和批準

      ISO/IEC 17025:2005
      CE: EMC Directive 2014/30/EU
      Directive 2011/65/EU

      UL (Recognized):
      Class I, Div 2, Group A, B, C, D
      Class I, Zone 2, IIC T4
      Class II, Zone 22

      ATEX: II 3 G Ex nA IIC T4 Gc

      IECEx: II 3 G Ex nA IIC T4 Gc

      KOSHA: Ex nA IIC T4

       

      符合環保要求

      RoHS Directive (2011/65/EU)

      REACH Directive EC 1907/2006

      大小

      Medium



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